High Resolution
Inline AXI platform


The XS-platform series is a small-footprint high-resolution automated X-ray inspection system concept designed for sophisticated high-speed inspection of semiconductor samples, wire bonds and PCB-assembly boards for single/multipanels or samples in trays. The inspectable applications range from component level inspection to mid-sized SMT boards.

​X-ray System Features

  • High speed AXI system with minimum footprint for inline setups
  • Microfocus / Submicron X-ray tube (sealed tube / maintenance free)
  • Resolution down to <1µm
  • Multiple programmable motion system with servo drives
  • Digital CMOS flatpanel detector
  • Automatic grey-level and geometrical calibration
  • Full product traceability via customized MES-Interface


  • Same-side load/unload configuration
  • Barcode scanner for serial number and product type selection
  • Auto BCR scanning station (x-y gantry)
  • Low dose radiation filter

Available Setups

  • SMT setup for component and solder-joint inspection on PCB, hybrid or chip level assembly processes
  • Semi-Backend setup for semiconductor applications, wire bond Test (pre & post), light & complex PCB’s and flex circuits

Available Configurations

Depending on the type of product & inspection task
  • XS-2 Transmission (2D) + SFT™
  • XS-2.5 Transmission (2D) + SFT™ + Off-Axis (2.5D)
  • XS-3 Transmission (2D) + SFT™ + Off-Axis (2.5D) + 3D SART


Inspection Technologies